HANGZHOU ZETIAN TECHNOLOGY CO., LTD.
TY_ENS
Specification

Specification

Flow Range of Dilution Gas:0-10SLPM Temperature Range: 5℃-40℃
FLow Range of Calibration Gas: 0-100SCCM Dimension:178mm*430mm*630mm
Flow Control Accuracy: ±1%F.S Weight:14.06kg(basic unit)
Flow Control Linearity: ±0.5%F.S. Power:200V-240V,50/60HZ,400W
Flow Control Repeatability: ±0.2%F.S. Analog Output: 10V,5V,1V,0.1V(optional)
Flow Demand of Dilution Gas: 10SLPM@30psi Comm: RS232,RS485
Response Time:180s(T98)

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